Contact

Dr. Gennady Logvenov
Phone:+49 (0) 711 689-1399Fax:+49 (0) 711 689-1479

Technology

Experimental Facilities

Thin Film Lab

Principles of thin film depostion.

Thermal evaporation
Thermal evaporation
Electron gun beam evaporation
Electron gun beam evaporation

4 High Vacuum Deposition Systems with thermal and e-beam evaporators (encompassing 3 generations of systems)

Commercial high vacuum evaporation system with e-gun and thermal evaporators. Computer control of deposition rate and thickness. Suitable for multilayer deposition.
Commercial high vacuum evaporation system with e-gun and thermal evaporators. Computer control of deposition rate and thickness. Suitable for multilayer deposition. [less]
Electron gun in a standard high vacuum evaporation chamber.
Electron gun in a standard high vacuum evaporation chamber.

Commercial rate controlled thermal evaporator.
Commercial rate controlled thermal evaporator.
Commercial high vacuum depostion machine with e-gun and thermal evaporators.
Commercial high vacuum depostion machine with e-gun and thermal evaporators.
Homebuild RF sputtering machine. Zoom Image
Homebuild RF sputtering machine.
Homebuild RF sputtering machine with two RF heads and loadlock chamber. Zoom Image
Homebuild RF sputtering machine with two RF heads and loadlock chamber.

 
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