Instrumentation

SEMs

The group has four SEMs, excellent for imaging, EDX or WDX, and our latest addition incorporates a FIB for sample preparation. The LEO 438VP allows large tilt angles and can be used for orientation imaging microscopy. The EPMA Cameca SX 100 is used for WDX and has special anti-contamination equipment installed. The Zeiss DSM 982 Gemini is high resolution SEM. The FEI SCIOS allows us to do FIB sample cutting and thinning for high-precision sample preparation.

LEO 438VP SEM: 5 nm resolution, 90° tilt angle, EDX, BSE and OIM detectors. Zoom Image
LEO 438VP SEM: 5 nm resolution, 90° tilt angle, EDX, BSE and OIM detectors.
EPMA Cameca SX 100: 6 nm resolution, BSE, EDX detectors and 5 WDX detectors with LIF, PET, TAP, PC0, PC1, PC2, PC3 small and large crystals. An air jet and cooling plate are available to reduce contamination. Zoom Image
EPMA Cameca SX 100: 6 nm resolution, BSE, EDX detectors and 5 WDX detectors with LIF, PET, TAP, PC0, PC1, PC2, PC3 small and large crystals. An air jet and cooling plate are available to reduce contamination. [less]
Zeiss DSM 982 Gemini: 1-4 nm resolution, -15° to + 90° tilt range, EDX and BSE detectors. Zoom Image
Zeiss DSM 982 Gemini: 1-4 nm resolution, -15° to + 90° tilt range, EDX and BSE detectors.
FEI SCIOS: 1 nm SEM resolution, 5 nm FIB resolution, -15° to +90° tilt range, BSE detector. Zoom Image
FEI SCIOS: 1 nm SEM resolution, 5 nm FIB resolution, -15° to +90° tilt range, BSE detector.
 
loading content