TEM Comparison Table            

 

ARM200F
Probe Corrected

ARM200F
Image Corrected

Philips
CM200

Zeiss 912
Omega

HRTEM
(Scherzer resolution)
0.19 nm 0.10 nm 0.27 nm 0.37 nm
         
X-ray analysis
(spatial resolution)
< 1 nm 1 nm
         

EELS analysis

spatial resolution

energy resolution

0.2 nm

0.3 eV

0.5 nm

0.3 eV

parallel

>20 nm

0.9 eV

 

 

 

   

 

Maximal tilt angle 20°/20° 20°/20° 60°/30° 60°/30°
         
Heating stage
(max. temperature)
900 °C 900 °C 900 °C
         
Cooling stage –160 °C –160 °C –160 °C –160°C
         
Energy-filtering TEM yes yes yes
         
Z-contrast yes yes
         
Energy-filtered diffraction yes yes yes
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