Contact

Prof. (apl.) Dr. Jürgen Weis
Head of the Nanostructuring Lab
Phone:+49 711 689-1329Fax:+49 711 689-1572

Max Planck Institute for Solid State Research

Heisenbergstraße 1, 70569 Stuttgart

Publications with Key Contributions from the Nanostructuring Lab

Icons representing important techniques available in the Nanostructuring Lab.

 

Icons representing important techniques available in the Nanostructuring Lab. © MPI-FKF / J. Weis


With January 1st 2011, the cleanroom facility – previously a facility of the von Klitzing department – became part of the newly established Scientific Facility Nanostructuring Lab (NSL). Under class-10 cleanroom conditions with stable room humidity and temperature, samples can be processed by students of the Institute or in service by the cleanroom staff using photolithography, dry and wet etching, and material deposition under vacuum. For the fabrication of structures down to 10 nm – on small but also large area, electron beam lithography systems (Raith eline, Jeol JBX 6300 FS) using electron beam acceleration voltages up to 100 kV are available. A focused ion beam system allows to cut and to sculpture samples under vision of a scanning electron microscope (Zeiss Crossbeam). A state-of-the-art scanning electron microscope (Zeiss Merlin) is offered as characterization tool. The infrastructure is intended to be used in parallel by many students on their own, is dedicated to deal with different materials avoiding cross-contamination, and especially to handle small sample sizes (typical 5 mm by 5 mm), but also wafers up to 4 inches.


Monolithically Integrated Circuits from Functional Oxides
R. Jany, C.Richter, C. Woltmann, G. Pfanzelt, B. Foerg, M. Rommel, T. Reindl, U. Waizmann, J. Weis,
J.A. Mundy, D.A. Muller, H. Boschker, J. Mannhart
Advanced Materials Interfaces 1, 1300031 (2014)      

Shape control in wafer-based aperiodic 3D nanostructures
H.-H. Jeong, A.G. Mark, J.G. Gibbs, T. Reindl, U. Waizmann, J. Weis, P. Fischer
Nanotechnology 25, 235302 (2014)

3D nanofabrication on complex seed shapes using glancing angle deposition
H.-H. Jeong, A.G. Mark, J.G. Gibbs, T. Reindl, U. Waizmann, J. Weis, P. Fischer
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) 20397, 437 (2014)

High-Performance ZnO Nanowire Transistors with Aluminum Top-Gate Electrodes and Naturally Formed Hybrid Self-Assembled Monolayer/AlOx Gate Dielectric
D. Kälblein, H. Ryu, F. Ante, B. Fenk, K. Hahn, K. Kern, H. Klauk
ACS Nano 8, 6840 (2014)

Eleven Nanometer Aligment Precision of a Plasmonic Nanoantenna with a Self-Assembed GaAs Quantum Dot
M. Pfeiffer, K. Lindfors, H. Zhang, B. Fenk, F. Phillipp, P. Atkinson, A. Rastelli, O.G. Schmidt, H. Giessen,
M. Lippitz
Nano Letters  14, 197 (2014)

High-Order Hilbert Curves: Fractal Structures with Isotropic, Tailorable Optical Properties
S. De Zuani, T. Reindl, M. Rommel, B. Gompf, A. Berrier, M. Dressel
ACS Photonics 2, 1719-1724 (2015)

Investigating hybridization schemes of coupled split-ring resonators by electron impacts
Q. Liang, Y. Wen, X. Mu, T. Reindl, W. Yu, N. Talebi, P. A. van Aken
Optics Express 16, 20721-20731 (2015)

Phase evolution in single-crystalline LiFePO4 followed by in situ scanning X-ray microscopy of a micrometer-sized battery
N. Ohmer, B. Fenk, D. Samuelis, C. Chen, J. Maier, M. Weigand, E. Goehring, G. Schütz
Nature Communications 6, 6045 (2015)

Electron Spin Polarization by Isospin Ordering in Correlated Two-Layer Quantum Hall Systems
L. Tiemann, W. Wegscheider, M. Hauser
Physical Review Letters 114, 176804 (2015)

 
loading content