Electron Microscope and Elemental Analysis

Equipment:

Philips ESEM XL30 TMP:

Tungsten-cathode Continuous acceleration potential up to 30kV High-Vacuum- or Auxiliary-Gas-Mode < 20Torr for non-conducting surfaces SE- and BSE-Detector Transfer-chamber for airsensitive samples Resolution < 3.5nm

EDAX S-UTW-Si(Li)-Detector:

Resolution: <65eV for C at 1000cps; <135eV for Mn-Kα at 1000cps detectability of elements Z ≥ 5 (Boron)

Application:

Investigation of the elemental combination of airsensitive and airresistive samples. Representation of the topological and material contrast of objects from 100mm to 20nm size. Non-conducting samples can also be sputtered with carbon or gold.