As a central facility of the Institute, the Nanostructuring Lab offers tools and equipment for sample processing and characterization under cleanroom conditions. These are usually operated by the NSL users – after being trained - on their own.

Requesting Access to NSL Service:
  • Application form for MPI-FKF contract holders (pdf)
  • Application form for MPI-FKF externals (University, MPI-IS, ...) (pdf)

Any requests or questions?
Please contact the NSL team via   .


<p>Electron Beam Lithography</p>

Electron Beam Lithography

– 100 kV Electron Beam Writer under Stable Environmental Conditions
    (Magnetic Field, Temperature, Humidity)
– SEM-based Electron Beam Writer with Interferometer-controlled Sample Stage

<p>Optical Lithography</p>

Optical Lithography

– Mask Design
– Mask Aligner for Exposure
– Direct Laser Writer

<p>Complex Sample Preparation with Focused Ion Beam</p>

Complex Sample Preparation with Focused Ion Beam

Scanning Electron Microscope combined with Focused Ion Beam, Micromanipulators and Gas Injection

<p>Imaging from Nano- to Centimeter Scale</p>

Imaging from Nano- to Centimeter Scale

– Photo Camera Setups
– Optical Microscopes
– Scanning Electron Microscopes (upgraded in 2020 with EDX, EBSD, EBIC, SPM)

<p>Plasma Etching</p>

Plasma Etching

– Fluorine, Chlorine, and Bromine Chemistry
– Bosch-like Processes

<p>Wetbenches and Fume Hoods</p>

Wetbenches and Fume Hoods

– Various Chemical Working Places for Spin Coating, Resist Developing,
   Wet Etching, Lift-Off, Sample Cleaning, Exfoliation, …
– Chemical fume hood for cleaning large UHV parts

<p>Material Deposition</p>

Material Deposition

– Sputtering
– Thermal Evaporation
– Atomic Layer Deposition

<p>Auxiliary Tools</p>

Auxiliary Tools

– Wire Bonding
– Plasma Cleaner
– Profilometer
– Ellipsometer
– Needle Probe Station
– Annealing Oven
– Critical Point Dryer
– Target preparation tool for milling, sawing, grinding and polishing samples

<p>Sample Characterization and Processing Excluding Air</p>

Sample Characterization and Processing Excluding Air

– Argon Glove Boxes (with automated High-end Optical Microscope)
– Vacuum Shuttle Connection (Vacuum-connected Network of SEM,
    FIB, material sputtering)

<p>Software Tools</p>

Software Tools

– Monte-Carlo-Simulation of Electron Scattering in Materials
– Proximity Corrections for Electron Beam Lithography
– 3D Data Analysis and Visualization

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