Feeding microwaves into the tunnel junction provides an additional degree of freedom for manipulating impurity levels, spins or the tunneling process itself. Microwaves facilitate coherent control, which is what we envision in future projects. We have implemented microwave control through an external antenna next to the tunnel junction for frequencies up to 100 GHz. With these new capabilities, we want to not only manipulate spins through electron spin resonance spectroscopy, but also other single level systems to explore coherent control.