SEMs

The group has three SEMs, excellent for imaging, EDX or WDX, and our latest addition incorporates a FIB for sample preparation. The FEI SCIOS allows us to do FIB sample cutting and thinning for high-precision sample preparation. The Zeiss DSM 982 Gemini is high resolution SEM. The EPMA Cameca SX 100 is used for WDX and has special anti-contamination equipment installed.

FEI SCIOS: 1 nm SEM resolution, 5 nm FIB resolution, -15° to +90° tilt range, BSE detector.
Zeiss DSM 982 Gemini: 1-4 nm resolution, -15° to + 90° tilt range, EDX and BSE detectors.
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