Instrumentation

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SEMs

The group has three SEMs, excellent for imaging, EDX or WDX, and our latest addition incorporates a FIB for sample preparation. The FEI SCIOS allows us to do FIB sample cutting and thinning for high-precision sample preparation. The Zeiss DSM 982 Gemini is high resolution SEM. The EPMA Cameca SX 100 is used for WDX and has special anti-contamination equipment installed.

FEI SCIOS: 1 nm SEM resolution, 5 nm FIB resolution, -15° to +90° tilt range, BSE detector. Zoom Image
FEI SCIOS: 1 nm SEM resolution, 5 nm FIB resolution, -15° to +90° tilt range, BSE detector.
Zeiss DSM 982 Gemini: 1-4 nm resolution, -15° to + 90° tilt range, EDX and BSE detectors. Zoom Image
Zeiss DSM 982 Gemini: 1-4 nm resolution, -15° to + 90° tilt range, EDX and BSE detectors.
EPMA Cameca SX 100: 6 nm resolution, BSE, EDX detectors and 5 WDX detectors with LIF, PET, TAP, PC0, PC1, PC2, PC3 small and large crystals. An air jet and cooling plate are available to reduce contamination. Zoom Image
EPMA Cameca SX 100: 6 nm resolution, BSE, EDX detectors and 5 WDX detectors with LIF, PET, TAP, PC0, PC1, PC2, PC3 small and large crystals. An air jet and cooling plate are available to reduce contamination. [less]
 
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