Thermo Fisher Scientific SCIOS 2
The SCIOS 2 is dedicated for TEM lamella preparation. It is equipped with a SE, a BSE and a STEM detector. The SEM resolution is around 1 nm, the FIB resolution is approximately 5 nm. The tilt range of the specimen stage is between -15° to +90°. As precursor gases for beam-induced deposition Pt and C are available.