First Integrated Circuits Built from Functional Oxides
The rich array of conventional and exotic electronic properties that can be generated by heterostructures of complex oxides is of great potential value for device applications. Integrated circuits (ICs) built from functional oxides are needed to fully exploit the functionality of oxides. However, it has not yet been possible to fabricate from these materials transistors that switch other transistors, which is a prerequisite for integrating functional oxides into ICs. In the manuscript we report on monolithically integrated logic circuits and chips with 700.000 transistors that utilize the conducting two-dimensional electron liquid generated by nature at the interface between two insulating oxides. Providing the capability to actively process the signals of functional oxide devices such as sensors directly on oxide chips, these results illustrate the practicability and the potential of oxide electronics. This research was done in collaboration with the team of the Nanostructuring Lab and with scientists from the Universities of Augsburg and Cornell.
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