TEM Comparison Table

	ARMD-TEM Probe Corrected	ARM200F Probe Corrected	ARM200F Image Corrected	Philips CM200
Acc. Voltage	60kV, 200kV	60kV, 80kV, 200kV	60kV, 80kV, 200kV	200kV

HRTEM (Scherzer resolution)	0.27 nm	0.19 nm	0.10 nm	0.27 nm

STEM	0.096 nm	0.078 nm	0.136 nm	-

X-ray analysis (spatial resolution)	< 1 nm	< 1 nm	1 nm	–

EELS analysis spatial resolution energy resolution	0.2 nm 0.015 eV	0.2 nm 0.3 eV	0.5 nm 0.3 eV	– –

Maximal tilt angle	35°/30°	20°/20°	20°/20°	60°/30°

Heating stage (max. temperature)	1200 °C	1200 °C	1200 °C	–

Cooling stage	<10 K	–160 °C	–160 °C	–160 °C

Energy-filtering TEM	yes	yes	yes	–

Z-contrast	yes	yes	yes	–

Energy-filtered diffraction	yes	yes	yes	–