TEM Comparison Table            

 

ARM200F Probe Corrected

ARM200F Image Corrected

     SESAM         

Philips CM200

Zeiss 912 Omega

HRTEM
(Scherzer resolution)
0.19 nm 0.10 nm 0.24 nm 0.27 nm 0.37 nm
           
X-ray analysis
(spatial resolution)
< 1 nm 1 nm 1 nm
           

EELS analysis

spatial resolution

energy resolution

0.2 nm

0.3 eV

0.5 nm

0.3 eV

parallel

>0.5 nm

0.07 eV

parallel

>20 nm

0.9 eV

 

 

 

   

 

Maximal tilt angle 20°/20° 20°/20° 30°/15° 60°/30° 60°/30°
           
Heating stage
(max. temperature)
900 °C 900 °C 900 °C 900 °C
           
Cooling stage –160 °C –160 °C –160 °C –160 °C –160°C
           
Energy-filtering TEM yes yes yes yes
           
Z-contrast yes yes yes
           
Energy-filtered diffraction yes yes yes yes
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