TEM Comparison Table

	ARM200F Probe Corrected	ARM200F Image Corrected	Philips CM200	Zeiss 912 Omega
HRTEM (Scherzer resolution)	0.19 nm	0.10 nm	0.27 nm	0.37 nm

X-ray analysis (spatial resolution)	< 1 nm	1 nm	–	–

EELS analysis spatial resolution energy resolution	0.2 nm – 0.3 eV	0.5 nm – 0.3 eV	– – –	parallel >20 nm 0.9 eV

Maximal tilt angle	20°/20°	20°/20°	60°/30°	60°/30°

Heating stage (max. temperature)	900 °C	900 °C	–	900 °C

Cooling stage	–160 °C	–160 °C	–160 °C	–160°C

Energy-filtering TEM	yes	yes	–	yes

Z-contrast	yes	yes	–	–

Energy-filtered diffraction	yes	yes	–	yes