TEM Comparison Table            

ARM200F Probe Corrected 

ARM200F Image Corrected

SESAM            

Philips CM200     

Zeiss 912 Omega   

HRTEM
(Scherzer resolution) 0.19 nm 0.10 nm 0.24 nm 0.27 nm – X-ray analysis
(spatial resolution) < 1 nm 1 nm 1 nm – >20 nm EELS analysis
spatial resolution
energy resolution

0.2 nm

0.3 eV

0.5 nm

0.3 eV

parallel
>0.5 nm
0.1–0.2 eV –

parallel
>20 nm
0.9 eV

Maximal tilt angle 20°/20° 20°/20° 30°/15° 60°/30° 60°/30° Heating stage
(max. temperature) 900 °C 900 °C 900 °C – 900 °C Cooling stage –160 °C –160 °C –160 °C –160 °C –160°C Energy-filtering TEM yes yes yes – yes Z-contrast yes yes yes – – Energy-filtered diffraction yes yes yes – yes
Go to Editor View