TEM Comparison Table
|
ARM200F Probe Corrected |
ARM200F Image Corrected |
SESAM |
Philips CM200 |
Zeiss 912 Omega |
|
| HRTEM (Scherzer resolution) |
0.19 nm | 0.10 nm | 0.24 nm | 0.27 nm | 0.37 nm |
| X-ray analysis (spatial resolution) |
< 1 nm | 1 nm | 1 nm | – | – |
|
EELS analysis spatial resolution energy resolution |
0.2 nm – 0.3 eV |
0.5 nm – 0.3 eV |
parallel >0.5 nm 0.07 eV |
– – – |
parallel >20 nm 0.9 eV |
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| Maximal tilt angle | 20°/20° | 20°/20° | 30°/15° | 60°/30° | 60°/30° |
| Heating stage (max. temperature) |
900 °C | 900 °C | 900 °C | – | 900 °C |
| Cooling stage | –160 °C | –160 °C | –160 °C | –160 °C | –160°C |
| Energy-filtering TEM | yes | yes | yes | – | yes |
| Z-contrast | yes | yes | yes | – | – |
| Energy-filtered diffraction | yes | yes | yes | – | yes |