Zeiss CrossBeam XB 1540
The Zeiss CrossBeam combines an ultra-high-resolution field-emission-source SEM with a high-performance FIB to allow 3D analysis with excellent SEM imaging performance. We primarily use it for FIB machining of TEM samples. Live, high-resolution SEM imaging during milling and thinning makes FIB sample preparation with this instrument easy and precise. Gas injection is possible for deposition of protective layers, or for etching. Also, the in-column SE detector makes imaging at low voltages practical, where required.