FEI FIB SCIOS

Our FIB-SEM system FEI Scios is mainly used for site-specific and high-precision preparation of TEM lamellae. A vacuum transfer system for air-sensitive samples is available, which allows the complete process from FIB preparation to TEM investigation to be done without air contact.

The SCIOS has a SE, a BSE and a STEM detector for imaging with SEM resolution about 1 nm and FIB resolution about 5 nm. The specimen stage can be tilted from -15° to +90°.

Further, the system is equipped with an EDX detector and EBSD camera (EDAX) for chemical and orientation analysis as well as with an EBIC system by Oxford Instruments.