Thin Film Lab

Principles of thin film depostion.

Thermal evaporation
Electron gun beam evaporation

4 High Vacuum Deposition Systems with thermal and e-beam evaporators (encompassing 3 generations of systems)

Commercial high vacuum evaporation system with e-gun and thermal evaporators. Computer control of deposition rate and thickness. Suitable for multilayer deposition.
Electron gun in a standard high vacuum evaporation chamber.

Commercial rate controlled thermal evaporator.
Commercial high vacuum depostion machine with e-gun and thermal evaporators.
Homebuild RF sputtering machine.
Homebuild RF sputtering machine with two RF heads and loadlock chamber.

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