Thin Film Lab
Principles of thin film depostion.
Thermal evaporation
© Max-Planck-Institute for Solid-State-Research
Electron gun beam evaporation
© Max-Planck-Institute for Solid-State-Research
4 High Vacuum Deposition Systems with thermal and e-beam evaporators (encompassing 3 generations of systems)
Commercial high vacuum evaporation system with e-gun and thermal evaporators. Computer control of deposition rate and thickness. Suitable for multilayer deposition.
© Max-Planck-Institute for Solid-State-Research
Electron gun in a standard high vacuum evaporation chamber.
© Max-Planck-Institute for Solid-State-Research
Commercial rate controlled thermal evaporator.
© Max-Planck-Institute for Solid-State-Research
Commercial high vacuum depostion machine with e-gun and thermal evaporators.
© Max-Planck-Institute for Solid-State-Research
Homebuild RF sputtering machine.
© Max-Planck-Institute for Solid-State-Research
Homebuild RF sputtering machine with two RF heads and loadlock chamber.
© Max-Planck-Institute for Solid-State-Research