Thin Film Lab
Principles of thin film depostion.
![Thermal evaporation](/6271365/original-1518437349.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzEzNjV9--bde0b3e34ec41a8bbfecc2a9733bf1c3d57af79c)
Thermal evaporation
© Max-Planck-Institute for Solid-State-Research
![Electron gun beam evaporation](/6271376/original-1518437350.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzEzNzZ9--5824d80340079fe8c188d68e862bd631053c87fb)
Electron gun beam evaporation
© Max-Planck-Institute for Solid-State-Research
4 High Vacuum Deposition Systems with thermal and e-beam evaporators (encompassing 3 generations of systems)
![Commercial high vacuum evaporation system with e-gun and thermal evaporators. Computer control of deposition rate and thickness. Suitable for multilayer deposition.](/6271332/original-1518437349.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzEzMzJ9--850b4925a3a66044ad5ac8b920b18721535eac42)
Commercial high vacuum evaporation system with e-gun and thermal evaporators. Computer control of deposition rate and thickness. Suitable for multilayer deposition.
© Max-Planck-Institute for Solid-State-Research
![Electron gun in a standard high vacuum evaporation chamber.](/6271387/original-1518437350.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzEzODd9--0e40fe19a9182be75be1a91cede165c6740685e8)
Electron gun in a standard high vacuum evaporation chamber.
© Max-Planck-Institute for Solid-State-Research
![Commercial rate controlled thermal evaporator.](/6271343/original-1518437349.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzEzNDN9--403fd721efc3b75d7fbea86b05a9c0192102782e)
Commercial rate controlled thermal evaporator.
© Max-Planck-Institute for Solid-State-Research
![Commercial high vacuum depostion machine with e-gun and thermal evaporators.](/6271354/original-1518437349.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyNzEzNTR9--3b044adae3903880c1a5295d1705b60dd2b56da5)
Commercial high vacuum depostion machine with e-gun and thermal evaporators.
© Max-Planck-Institute for Solid-State-Research
![Homebuild RF sputtering machine.](/6284200/original-1518447258.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyODQyMDB9--5096b28353a68b47b25f103ee40ea9884edd251d)
Homebuild RF sputtering machine.
© Max-Planck-Institute for Solid-State-Research
![Homebuild RF sputtering machine with two RF heads and loadlock chamber.](/6284189/original-1518447258.jpg?t=eyJ3aWR0aCI6MjQ2LCJvYmpfaWQiOjYyODQxODl9--079bd535fcc60f8afb6fde4eea00908f63f40ba5)
Homebuild RF sputtering machine with two RF heads and loadlock chamber.
© Max-Planck-Institute for Solid-State-Research