Dr. Gennady Logvenov
Phone:+49 (0) 711 689-1399Fax:+49 (0) 711 689-1479

Thin Film Technology

Experimental Facilities

Micropatterning and Bonding Lab

• Mask Aligner from Karl Suess

• Computerized photoresist spin coating system.

• Ion etching System with endpoint detection by high resolution mass spectroscopy

• Profilometer (Bruker DektakXT)

• Ultrasonic wire bonding machines (Wedge and Ball bonding)

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