Micropatterning and Bonding Lab
• Mask Aligner from Karl Suess

© Max-Planck-Institute for Solid-State-Research
• Computerized photoresist spin coating system.

© Max-Planck-Institute for Solid-State-Research
• Ion etching System with endpoint detection by high resolution mass spectroscopy

© Max-Planck-Institute for Solid-State-Research
• Profilometer (Bruker DektakXT)

© Max-Planck-Institute for Solid-State-Research
• Ultrasonic wire bonding machines (Wedge and Ball bonding)

© Max-Planck-Institute for Solid-State-Research