Micropatterning and Bonding Lab

• Mask Aligner from Karl Suess

© Max-Planck-Institute for Solid-State-Research

• Computerized photoresist spin coating system.

© Max-Planck-Institute for Solid-State-Research

• Ion etching System with endpoint detection by high resolution mass spectroscopy

© Max-Planck-Institute for Solid-State-Research

• Profilometer (Bruker DektakXT)

© Max-Planck-Institute for Solid-State-Research

• Ultrasonic wire bonding machines (Wedge and Ball bonding)

© Max-Planck-Institute for Solid-State-Research
Web-View
Print Page
Open in new window
Estimated DIN-A4 page-width
Go to Editor View